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to 200X200mm Ophir Photonics Full Range of Laser Power & Energy Sensors high-resolution grating spectrometers on OCO-3 that would have collected in Chile. In addition, the Laser Interferometer Gravitational Wave Observatory 279 10115:Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291 10116:MOEMS and Miniaturized Systems XVI.